Design of a MEMS geophone and its parameters testing

Wang Weibo,Chen Wenjie,Wang Chuntian,Wang Ziyang，Sheng Guanqun

Equipment for Geophysical Prospecting ›› 2014, Vol. 24 ›› Issue (1) : 1-4.

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Equipment for Geophysical Prospecting ›› 2014, Vol. 24 ›› Issue (1) : 1-4.
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Design of a MEMS geophone and its parameters testing

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