一种MEMS检波器设计及其性能测试<sup>*</sup>

一种MEMS检波器设计及其性能测试^*

王维波,陈文杰,王春田,王子阳,盛冠群

Design of a MEMS geophone and its parameters testing

Wang Weibo,Chen Wenjie,Wang Chuntian,Wang Ziyang，Sheng Guanqun

物探装备 . 2014, (1): 1 -4 .